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Heraeus® Suprasil 1 Synthetic Fused Silica

Heraeus® Suprasil 1 is a high-purity synthetic fused silica material used for demanding UV optical, semiconductor, laser and scientific instrumentation applications. With high SiO₂ purity above 99.99%, excellent deep-UV transmission from 170–2500 nm, low thermal expansion of 0.51 × 10⁻⁶ /°C and optical homogeneity up to Δn ≤ 1 × 10⁻⁶, Suprasil 1 is suitable for precision components that require stable UV transmission, low impurity levels and reliable performance under thermal or optical stress.

We supply customized Heraeus® Suprasil 1 fused silica components according to drawings, dimensions, thickness, surface quality and application requirements. Typical products include photolithography optics, semiconductor process windows, 193 nm / 248 nm excimer laser optics, UV lenses, prisms, optical windows, mirrors, spectroscopy components and other precision fused silica parts for optical and industrial projects.

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Details Introduction

1. Basic Information

ItemSpecification
Material TypeSynthetic Fused Silica
BrandHeraeus®
GradeSuprasil 1
Typical OH Content≈ 600–1200 ppm (High OH)
Density2.20 g/cm³

2. Thermal Properties

ItemSpecification
CTE (0–300°C)0.51 × 10⁻⁶ /°C
Softening Point≈ 1585°C
Annealing Point≈ 1042°C
Strain Point≈ 890°C
Thermal Conductivity1.38 W/(m·K)

3. Mechanical Properties

ItemSpecification
Young’s Modulus72.7 GPa
Shear Modulus31.4 GPa
Poisson’s Ratio0.17
Knoop Hardness≈ 522 kg/mm²
Flexural Strength≈ 67 MPa

4. Optical Properties

ItemSpecification
Refractive Index @ 587.6 nm1.4585
Abbe Number67.8
Transmission Range170–2500 nm
UV TransmissionExcellent (Deep UV)
HomogeneityΔn ≤ 1 × 10⁻⁶

5. Electrical Properties

ItemSpecification
Dielectric Constant (20°C, 1 MHz)3.75
Loss Tangent≈ 0.0001
Volume Resistivity> 10¹⁸ Ω·cm
Dielectric Strength≈ 250–400 kV/cm

6. Chemical Purity

ItemSpecification
SiO₂ Content> 99.99%
Metal Impurities< 1 ppm (total)
Bubbles & InclusionsExtremely Low
Chemical ResistanceExcellent (except HF)

7. Typical Applications

FieldApplication
SemiconductorPhotolithography optics, process windows
Laser193 nm / 248 nm excimer laser optics
OpticsUV lenses, prisms, windows and mirrors
ScientificSpectroscopy, fluorescence and UV instrumentation

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